bandwidth
Capacitive actuation and piezoresistive detection (CAPD) mechanisms have been explored to enhance the bandwidth of resonant accelerometers, leveraging their high transduction gain to amplify weak signals. Despite these advantages, the stiffness of beams for the piezoresistive gauges poses a challenge to achieving high sensitivity and resolution. To address this limitation, this paper presents a high-resolution resonant accelerometer with enhanced scale factor using a thermal boost approach to increase sensitivity.
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