
This dataset contains the data used to create figures for the manuscript Robust Complementary Logic Using Multi-Gate N/MEMS Relays. This paper presents novel complementary logic gate structures and discusses failure modes and optimization methods for these devices. A detailed comparison of metallization schemes and operational modes is included as well. In this dataset, information used to generate figure 2 (a, b), 4, 5 (a), and 6 are contained herein. Figure 2 show cases the change in response time with variations in handle layer voltage. Figure 4 present
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