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CMOS-MEMS resonators seamlessly integrated in advanced integrated circuit (IC) technology have the unique capability to enable unprecedented integration of stable frequency references, acoustic spectral processors, and physical sensors. Demonstrations of transducers leveraging piezoelectric properties of emerging ferroelectric materials such as Hafnium Zirconium Oxide (HZO) and Aluminum Scandium Nitride (AlScN) enable high figure of merit (FOM = k^2Q) resonators over a wide range of frequencies.


The proposed signals are used  for electromagnetic-based stroke classification.  Six realistic head phantom computed from MRI scans, is surrounded by an antenna array of 16 dipole antennas distributed uniformly around the head. These antennas are deployed in a fixed circular array around the head, at a distance of approximately 2-3 mm from the head. A Gaussian pulse covering the bandwidth from 0:7 to 2 GHz is emitted from each of the antennas, sequentially, while all of the antennas capture the scattered signals. Since 16 antennas were used, there are a total of 256 channel signals (i.e.