This dataset contains the data used to create figures for the manuscript Robust Complementary Logic Using Multi-Gate N/MEMS Relays. This paper presents novel complementary logic gate structures and discusses failure modes and optimization methods for these devices. A detailed comparison of metallization schemes and operational modes is included as well. In this dataset, information used to generate figure 2 (a, b), 4, 5 (a), and 6 are contained herein. Figure 2 show cases the change in response time with variations in handle layer voltage. Figure 4 presents relay life
Data used to produce figures 5-7 in the paper Multi-Gate In-plane Actuated NEMS Relays for Effective Complementary Logic Gate Designs as well as tables 1 and 2. Figure 5 shows input and output data collected from a 3-input NAND gate comprised of a novel multi-gate (multi-input relay). Figures 6 and 7 present data from COMSOL simulations indended to outline a procedere for optimizing these relays and allow for scaling of the device parameters. Table 1 compares our designs with those of other works, in terms of number of relays and critical path. Table 2 compares the parameters