Data used to produce figures 5-7 in the paper Multi-Gate In-plane Actuated NEMS Relays for Effective  Complementary Logic Gate Designs as well as tables 1 and 2.  Figure 5 shows input and output data collected from a 3-input NAND gate comprised of a novel multi-gate (multi-input relay).  Figures 6 and 7 present data from COMSOL simulations indended to outline a procedere for optimizing these relays and allow for scaling of the device parameters.  Table 1 compares our designs with those of other works, in terms of number of relays and critical path.  Table 2 compares the parameters