3D-NAND flash memory is currently essential in the semiconductor industry due to the interference issue between memory cells of the conventional planar type. To vertically stack the memory, an oxide-nitride (ON) stack structure is formed using plasma enhanced chemical vapor deposition (PECVD) equipment. Thereafter, a part of the silicon nitride (Si3N4) layer is removed by wet etching using phosphoric acid (H3PO4) to make a space for the memory cell. It is important to selectively wet etch only the Si3N4 film while protecting the silicon oxide (SiO2).


Extended reality (XR) head-mounted displays (HMDs) are increasingly starting to rely on wireless task
offloading in a bid to allow unobstructed XR user movement, while still rendering high-resolution video on
a remote processing node. An example is the Oculus (Meta) Quest 2. However, congestion and reliability
issues associated with the wireless network can cause high latency and an overall low quality of service (QoS).
Therefore, understanding XR user mobility is of vital importance for supporting XR applications in future
wireless networks.


Although resonant vibration in the ultrasonic frequency range is thought as a power-intensive way for actuation, its application to untethered miniature mobile robots is still challenging because of lacking the onboard circuit that produces the ultrasonic signals with modulatable frequencies, voltages, and phases. To tackle this problem, first, the ultrasonic transducers whose longitudinal/bending vibrations share a common node was made to steadily support other components. Second, an onboard circuit was designed to convert the battery’s DC signal into multi-channels of ultrasonic signals amplified in a multi-level manner. Third, these components were compactly integrated to developed an untethered ultrasonic robot (U2sonobot) with fast, flexible, and load-carriable movements. The prototype was 54 × 52 × 46 mm3 in size and 76.5 g in weight, and its moving/carrying performance was assessed. At 59.3 kHz frequency, it yielded the maximal speed of 221 mm/s and the minimal step displacement of 0.3 μm. According to the wirelessly-received commands, it produced the flexible movements (e.g., those with adjustable speed/steering-radii and in-situ rotations) and climbed 8.9° slope. Moreover, it carried the maximal payload of 520 g and provided the minimal cost of transport of 3.9. The optical focusing/scanning system is a candidate application area for U2sonobot.


In this work we present a study of micro-photoluminescence (PL) emission from a novel InGaN quantum well (QW) emitting structure with integrated micro-cavity, which can be used for VCSEL applications. The micro-cavity exhibiting Tamm plasmon optical states is formed by porous GaN distributed Bragg reflector (DBR) bottom mirror and top plasmonic silver metal mirror. Results of PL, Fourier imaging spectroscopy and finite-difference time-domain simulations are presented and discussed.


After considering the pervasiveness of same/different relationships in Psychology and the experimental evidence of their perceptual foundation in Psychophysics and Infant and Comparative Psychology, the paper develops its main argument. Similarity and diversity do not complete the panorama since opposition constitutes a third relationship which is distinct from the other two. There is evidence of this in previous literature investigating the perceptual basis of opposition and in the results of the two new studies presented in this paper.


A two-stage sampling method was employed for this study. In the first stage, five elderly care institutions in Tangshan Province were randomly selected from a pool of 70 institutions listed in the Notice of Hebei Provincial Department of Civil Affairs on the Grading Results of Elderly Care Institutions in January 2022. In the second stage, cluster sampling was conducted among the elderly residents within these five selected institutions.


This data set contains 120 text files describing the functional requirements written in natural language (English) for various software  systems, such as educational, business, and hospitality settings. The dataset is ready for all text processing such as learning and extracting conceptual models.


This paper introduces an assessment of mobile Internet of Things (IoT) devices embedded with Global Positioning Service (GPS) / Global Navigation Satellite System (GNSS) chip, envisioned to enhance positioning accuracy for safety and on-demand location aware user applications and architecture such as mobile payment applications. This paper extends previous works and proposes a detailed Hybrid assessment, coupling design and performance metrics of Global Navigation Satellite System (GNSS) mobile IoT receivers.


Data used to produce figures 5-7 in the paper Multi-Gate In-plane Actuated NEMS Relays for Effective  Complementary Logic Gate Designs as well as tables 1 and 2.  Figure 5 shows input and output data collected from a 3-input NAND gate comprised of a novel multi-gate (multi-input relay).  Figures 6 and 7 present data from COMSOL simulations indended to outline a procedere for optimizing these relays and allow for scaling of the device parameters.  Table 1 compares our designs with those of other works, in terms of number of relays and critical path.  Table 2 compares the parameters


This dataset contains the data analyzed after extracting and processing information from several scientific articles related to the application of the autonomic paradigm to the orchestration and management of telecommunication networks. The dataset is composed of three excel files. The file "SLRPaperRawData.xlsx" contains the information extracted after reading the articles selected for the survey on "A Survey on the Autonomic Paradigm for Network Management and Orchestration".