This dataset contains cryogenic Id-Vd and Id-Vg data for N- and P-MOSFET (W/L = 10 μm/1μm) from 300 K to 4 K. These data contain the I-V data corresponding to different Vds, including the data of linear region and saturation region. A Keysight B1500A semiconductor analyzer attached to a pulse tube refrigerator was used to measure these data. The transconductance, threshold voltage, subthreshold swing, and other parameters of Cryo-CMOS can be obtained by processing these data.