This dataset is in support of my research paper 'Statistical Variability Study of RDF and LER on Nanosheet FETs at Sub 3nm Node'. In this study, we studied the influence of RDF and LER on NSFETs through NEGF method for simulation. The results are generated by simulation software, Nano-electronic Simulation Software (NESS), which was developed by the University of Glasgow’s Device Modelling Group. Our results predict the figures of merit of nanosheet devices at different channel lengths and widths with the influence of RDF and LER.