*.txt; .cir

The SPICE model of a ferroelectric negative capacitance - electrostatic MEMS hybrid actuator is presented. The model is validated for static pull-in and release characteristics. The simulation results are in agreement with the analytical predictions available in the literature. The model could be used for investigating the static, dynamic and load-line analysis of the hybrid actuator. The SPICE model being circuit compatible could be used along with other standard device models to evaluate various CMOS-MEMS hybrid circuits.