The SPICE model of a ferroelectric negative capacitance - electrostatic MEMS hybrid actuator is presented. The model is validated for static pull-in and release characteristics. The simulation results are in agreement with the analytical predictions available in the literature. The model could be used for investigating the static, dynamic and load-line analysis of the hybrid actuator. The SPICE model being circuit compatible could be used along with other standard device models to evaluate various CMOS-MEMS hybrid circuits.
1. Refer "Modeling Hybrid MEMS Actuator.pdf" for detailed implementation of the SPICE model in the circuit simulator.
2. Go through the "README.txt" for the instructions to simulate the hybrid actuator SPICE model in the circuit simulator using the SPICE netlist.
3. Go through the "README_Dataset.txt" for the instructions to plot the hybrid actuator characteristics using the dataset.