Infrared photonics
Silicon nitride has greatly improved the versatility of integrated photonics technologies due to its wide transparency window, compatibility with existing CMOS-foundry infrastruc ture, and its potential for extremely low propagation loss. However, its low refractive index reduces mode confinement, increasing the minimum device footprint of components such as the widely-adopted ring resonator filter, resulting in a height ened need for reduced-bending architecture to maintain high integration density.
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Silicon nitride has greatly improved the versatility of integrated photonics technologies due to its wide transparency window, compatibility with existing CMOS-foundry infrastruc ture, and its potential for extremely low propagation loss. However, its low refractive index reduces mode confinement, increasing the minimum device footprint of components such as the widely-adopted ring resonator filter, resulting in a height ened need for reduced-bending architecture to maintain high integration density.
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We report on the design and experimental verification of angle and polarization insensitive mid-infrared filters based on dense arrays of dielectric resonators embedded into a metallic film. We experimentally show filters with 60% peak transmission for angles from 0 to 60 degrees for perpendicular polarization states. We also study the surface plasmonic mode excited due to the periodicity of the micro-resonators in the array. Simulations support the experimental results for both the primary resonance and the plasmonic mode.
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