Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures

Citation Author(s):: Carlos
Errando-Herranz

KTH, QNP

Alain Yuji
Takabayashi
EPFL, Q-LAB

Pierre
Edinger
KTH, MST

Hamed
Sattari
EPFL, Q-LAB

Kristinn
B. Gylfason

KTH, MST

Niels
Quack

EPFL, Q-LAB
Submitted by:: Pierre Edinger
Last updated:: Thu, 09/19/2019 - 13:54
DOI:: 10.21227/fp2b-8b33
Data Format:: excel; txt files
License:: Creative Commons Attribution

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Categories:: Communications
Other
Keywords:: photonic MEMS; photonic integrated circuits, review

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CITE

Abstract

The following dataset summarizes key figures in reported photonic MEMS devices. The data was used to categorize devices, define and plot key figures of merit relevant to the field of photonic MEMS for scalable integrated circuits, as discussed in the invited review article "MEMS for Photonic Integrated Circuits".

Dataset Files

Data table used for Figures of Merit plots SiP_review_Qant_Data_SubmittedIEEE.xlsx (29.19 kB)

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