photonic MEMS; photonic integrated circuits

The following dataset summarizes key figures in reported photonic MEMS devices. The data was used to categorize devices, define and plot key figures of merit relevant to the field of photonic MEMS for scalable integrated circuits, as discussed in the invited review article  "MEMS for Photonic Integrated Circuits".

  • Communications
  • Last Updated On: 
    Thu, 09/19/2019 - 13:54