Process Industrial IoT data

Citation Author(s):
Tianteng
Wang
Submitted by:
Tianteng Wang
Last updated:
Fri, 03/27/2020 - 22:40
DOI:
10.21227/b814-8b80
License:
455 Views
Categories:
3
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Abstract 

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IoT data from a semi-conductor production line, which contains 589 production monitoring points (i.e. regarded as features) and 1963 data records.

Instructions: 

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This dataset is collected by various sensors (including wireless sensors, soft sensors), actuators and other measuring devices  from production units, process equipment and other links.

Dataset Files

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