Process Industrial IoT data
- Citation Author(s):
-
Tianteng Wang
- Submitted by:
- Tianteng Wang
- Last updated:
- DOI:
- 10.21227/b814-8b80
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- Categories:
Abstract
72 Normal 0 7.8 磅 0 2 false false false EN-US ZH-CN X-NONE /* Style Definitions */ table.MsoNormalTable {mso-style-name:普通表格; mso-tstyle-rowband-size:0; mso-tstyle-colband-size:0; mso-style-noshow:yes; mso-style-priority:99; mso-style-parent:""; mso-padding-alt:0cm 5.4pt 0cm 5.4pt; mso-para-margin:0cm; mso-para-margin-bottom:.0001pt; mso-pagination:widow-orphan; font-size:10.0pt; font-family:"Times New Roman",serif;} IoT data from a semi-conductor production line, which contains 589 production monitoring points (i.e. regarded as features) and 1963 data records.
Instructions:
72
Normal
0
7.8 磅
0
2
false
false
false
EN-US
ZH-CN
X-NONE
/* Style Definitions */
table.MsoNormalTable
{mso-style-name:普通表格;
mso-tstyle-rowband-size:0;
mso-tstyle-colband-size:0;
mso-style-noshow:yes;
mso-style-priority:99;
mso-style-parent:"";
mso-padding-alt:0cm 5.4pt 0cm 5.4pt;
mso-para-margin:0cm;
mso-para-margin-bottom:.0001pt;
mso-pagination:widow-orphan;
font-size:10.0pt;
font-family:"Times New Roman",serif;}
This dataset is collected by various sensors (including wireless sensors, soft sensors), actuators and other measuring devices from production units, process equipment and other links.
