Datasets
Standard Dataset
Mixed-type Wafer Defect Datasets
- Citation Author(s):
- Submitted by:
- Faisal Mohammad
- Last updated:
- Thu, 03/20/2025 - 22:44
- DOI:
- 10.21227/wmgm-hf24
- Data Format:
- Research Article Link:
- Links:
- License:
- Categories:
- Keywords:
Abstract
Defect pattern recognition (DPR) of wafer maps is critical for determining the root cause of production defects, which can provide insights for the yield improvement in wafer foundries. During wafer fabrication, several types of defects can be coupled together in a piece of wafer, it is called mixed-type defects DPR. To detect mixed-type defects is much more complicated because the combination of defects may vary a lot, from the type of defects, position, angle, number of defects, etc. Deep learning methods have been a good choice for complex pattern recognition problems. In this article, we propose a deformable convolutional network (DC-Net) for mixed-type DPR (MDPR) in which several types of defects are coupled together in a piece of wafer. A deformable convolutional unit is designed to selectively sample from mixed defects, then extract high-quality features from wafer maps. A multi-label output layer is improved with a one-hot encoding mechanism, which decomposes extract mixed features into each basic single defect. The experiment results indicate that the proposed DC-Net model outperforms conventional models and other deep learning models. Further results of the interpretable analysis reveal that the proposed DC-Net can accurately pinpoint the defects areas of wafer maps with noise points, which is beneficial for mixed-type DPR problems.
Dataset data_mutil_label.npz
Data
[‘arr_0’]: Defect data of mixed-type wafer map, 0 means blank spot, 1 represents normal die that passed the electrical test, and 2 represents broken die that failed the electrical test. The data shape is 52×52.
[‘arr_1’]: Mixed-type wafer map defect label, using one-hot encoding, a total of 8 dimensions, corresponding to the 8 basic types of wafer map defects (single defect).
Demonstration: There are 38 types in the mixed-type wafer map defect dataset, including 1 normal type, 8 single defect types, and 29 mixed-type defect types.
Documentation
Attachment | Size |
---|---|
985.25 KB |
Comments
Multiclass Mixed-type wafer map defect dataset
혹시 이 자료 보내 주실수 있을까요? 저희 학교 졸업작품에 데이터 셋을 만들어야 하는데