Micro-scale 2D Thermal Gradiometer

Micro-scale 2D Thermal Gradiometer

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Xueting Yan
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Thu, 09/05/2019 - 17:32
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The videos demonstrate 2D thermal gradient mappings based on two pairs of 50 µm x- an y- thin film thermocouple (TFTC) sensors. We investigate thin film thermocouples (TFTC) asthermal gradient sensors at the micro-scale and demonstrate two-dimensional dynamic thermal gradient mapping for features as small as 20 μm. Pairs of x-direction and y-direction thermocouples sense the thermal gradient while another calibrates the Seebeck coefficient as S = 20.33±0.01μV/K. The smallest detectable temperature difference is 10 mK, and the sensitivity is 0.5 mK/μm. The minimal Johnson-noise limited performance for thermocouple devices with typical integrated-circuit dimension is 1.4 nV/√Hz. This device can be applied for embedded thermal management systems that require high resolution and rapidresponse thermal management, such as stacked three-dimensional (3D) integrated circuits.


The videos show the real-time detections of 2D thermal gradient on a glass slide when the dynamic heat source is:

- Moving counter-clockwise in a circle

- Moving at four directions, top, bottom, left and right.


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[1] Xueting Yan, "Micro-scale 2D Thermal Gradiometer", IEEE Dataport, 2019. [Online]. Available: http://dx.doi.org/10.21227/2vrc-6825. Accessed: Feb. 22, 2020.
doi = {10.21227/2vrc-6825},
url = {http://dx.doi.org/10.21227/2vrc-6825},
author = {Xueting Yan },
publisher = {IEEE Dataport},
title = {Micro-scale 2D Thermal Gradiometer},
year = {2019} }
T1 - Micro-scale 2D Thermal Gradiometer
AU - Xueting Yan
PY - 2019
PB - IEEE Dataport
UR - 10.21227/2vrc-6825
ER -
Xueting Yan. (2019). Micro-scale 2D Thermal Gradiometer. IEEE Dataport. http://dx.doi.org/10.21227/2vrc-6825
Xueting Yan, 2019. Micro-scale 2D Thermal Gradiometer. Available at: http://dx.doi.org/10.21227/2vrc-6825.
Xueting Yan. (2019). "Micro-scale 2D Thermal Gradiometer." Web.
1. Xueting Yan. Micro-scale 2D Thermal Gradiometer [Internet]. IEEE Dataport; 2019. Available from : http://dx.doi.org/10.21227/2vrc-6825
Xueting Yan. "Micro-scale 2D Thermal Gradiometer." doi: 10.21227/2vrc-6825