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A High-Power Modular Radio Frequency Converter with Wide-Range Power Regulation Under ZVS Operation
- Citation Author(s):
- Submitted by:
- Wang Jingtao
- Last updated:
- Thu, 04/17/2025 - 09:49
- DOI:
- 10.21227/g3qc-vr72
- License:
21 Views- Categories:
- Keywords:
Abstract
Radio frequency converter (RFC) is widely used in the semiconductor manufacturing industry, which requires high power, high efficiency, and a wide power regulation range. To fulfill these demands, this paper proposes efficient modular power amplifiers (PAs), where multiple RFC modules are constructed using full-bridge class-D PAs. The constant-current output characteristics of individual modules and the system-level power delivery capability are comprehensively analyzed. Additionally, a hybrid modulation strategy combining module number adjustment and DC voltage control is proposed to achieve wide-range power regulation without requiring auxiliary circuits. A 3-kW four-module RFC prototype is implemented and tested at 400 kHz. Experimental results demonstrate an extended output power range from 100 W to 2.8 kW with a peak efficiency of 93.7%, accompanied by low output current harmonic distortions. The findings validate the superior performance of the proposed architecture in practical applications
Radio frequency converter (RFC) is widely used in the semiconductor manufacturing industry, which requires high power, high efficiency, and a wide power regulation range. To fulfill these demands, this paper proposes efficient modular power amplifiers (PAs), where multiple RFC modules are constructed using full-bridge class-D PAs. The constant-current output characteristics of individual modules and the system-level power delivery capability are comprehensively analyzed. Additionally, a hybrid modulation strategy combining module number adjustment and DC voltage control is proposed to achieve wide-range power regulation without requiring auxiliary circuits. A 3-kW four-module RFC prototype is implemented and tested at 400 kHz. Experimental results demonstrate an extended output power range from 100 W to 2.8 kW with a peak efficiency of 93.7%, accompanied by low output current harmonic distortions. The findings validate the superior performance of the proposed architecture in practical applications
