harmonics
The power generated by electricity industry is presently concentrating on the mitigation of power quality (PQ) difficulties. Numerous PQ issues are brought about by automation in industry andthe integration of distributedgeneration using powerelectronic converters this calls for PQ enhancement. This contributes to the equipment'sextendedlifespanandincreasedependabilityofsupplies for feeding vital loads into the system. Electric power transmission efficiency from the source to industrial, home, and commercial consumersis measured byPQ.
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As semiconductor devices have become increasingly miniaturized, the ability to control very small Critical Dimensions (CDs) during the etching process has become crucial through controlled plasma processes. Consequently, diagnosing plasma and reflecting this in the process to enhance yield is of paramount importance. Typically, an invasive sensor like a Single Langmuir Probe (SLP) is utilized for plasma diagnostics. However, using this sensor can affect the plasma, necessitating the use of non-invasive diagnostic methods.
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