Physics-prior Bayesian neural networks in semiconductor processing

Citation Author(s):
Albert
Lin
Submitted by:
Albert Lin
Last updated:
Thu, 09/05/2019 - 12:15
DOI:
10.21227/6mgc-1y60
License:
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Abstract 

This is the dataset for the manuscript entitled "Physics-prior Bayesian neural networks in semiconductor processing", IEEE Access

Instructions: 

BNN3_criticism_trueData.py: calculating baseline

BNN3_criticism_trueData_priorNN: prior NN calcultion using TCAD data

BNN3_criticism_trueData_TCADprior: TCAD prior inference

sim2_.xlsx:TCAD data

exp2.xlsx: experiment data