Physics-prior Bayesian neural networks in semiconductor processing
- Citation Author(s):
-
Albert Lin
- Submitted by:
- Albert Lin
- Last updated:
- DOI:
- 10.21227/6mgc-1y60
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- Categories:
Abstract
This is the dataset for the manuscript entitled "Physics-prior Bayesian neural networks in semiconductor processing", IEEE Access
Instructions:
BNN3_criticism_trueData.py: calculating baseline
BNN3_criticism_trueData_priorNN: prior NN calcultion using TCAD data
BNN3_criticism_trueData_TCADprior: TCAD prior inference
sim2_.xlsx:TCAD data
exp2.xlsx: experiment data
