In order to study the role and mechanism of the Cu surface during the generation of SF6 decomposition products inside GIS, we established the interfacial reaction model of low-fluorine sulfides with oxygen on the Cu(111) surface. The influence of the Cu metal on the reaction is analyzed from the perspective of reaction kinetics. Thermodynamic properties and structural files of the reactions can be found in Supplementary Materials. We have supplemented the thermodynamic properties of reactions, and also how we calculated them in Supporting information file.