This research examined the electrical characteristics of a conventional junctionless silicon-on-insulator (SOI-JL) and a SOI hybrid P/N fin channel JL thin film transistor (SOI-H-JL) using a simulation with gate lengths from 60 nm to 10 nm. The interface location of the SOI-H-JL has a depletion region of a parallel channel, which influences the effective thickness of the channel. The threshold voltage can be adjusted by changing the concentration of the substrate. Better electrical characteristics