non-volatile memory

Tri-gate ferroelectric FETs with HZO gate insulator for memory and neuromorphic applications are fabricated and characterized for multi-level operation. The conductance and threshold voltage exhibit highly linear and symmetric characteristics. A compact analytical model is developed to accurately capture FET transfer characteristics, including series resistance, coulombic scattering, and vertical field dependent mobility degradation effects, as well as the evolvement of threshold voltage and mobility with ferroelectric polarization switching.