MEMS Mirror

Description:

1. Movie "movie_S1.avi" demonstrates the normalized absolute element values of dynamic influence matrices and its scaled matrices by comb drive torque along the amplitude. The dynamic influence matrices are plotted according to the comb drive frequency component, index n, and the input frequency component, index m. The absolute values of the elements of the matrix are normalized by its maximum element. The maximum element is drawn in white and the normalized elements less than 10e−6 of the maximum element are depicted in black.