Ferroelectrics

CMOS-MEMS resonators seamlessly integrated in advanced integrated circuit (IC) technology have the unique capability to enable unprecedented integration of stable frequency references, acoustic spectral processors, and physical sensors. Demonstrations of transducers leveraging piezoelectric properties of emerging ferroelectric materials such as Hafnium Zirconium Oxide (HZO) and Aluminum Scandium Nitride (AlScN) enable high figure of merit (FOM = k^2Q) resonators over a wide range of frequencies.