A Passive Wireless Switching Array Based on MEMS Switches

A Passive Wireless Switching Array Based on MEMS Switches

Citation Author(s):
Lifeng
Wang
Jinquan
Wang
Yue
Jin
Submitted by:
Li Feng Wang
Last updated:
Thu, 08/08/2019 - 04:30
DOI:
10.21227/73yq-tp74
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Abstract: 

Passive wireless actuators have advantages similar to passive wireless sensors, which is also suitable for use in human body or sealed spaces that require wireless operation or control. This paper proposes a passive wireless switching array based on MEMS switches. By inductive coupling, AC signals are used as power as well as control signals at the same time. The switching system includes four switching branches, each of which is composed of a receiving inductor, an AC-DC convert circuit, a MEMS switch, and a load. The detail designs of the circuit part and the MEMS switch are provided, respectively. The MEMS switches are driven by electrostatic combs and are fabricated based on the SOI process. The average measured actuation voltage of the fabricated MEMS switches is 20.4 V. The error between the average measured value and the design value is within 5%. The AC control signals are set to 7.8 MHz, 6 MHz, 4 MHz and 1.8 MHz corresponding to the resonant frequencies of the four switching branches, and their peak to peak voltages are all set to 8V. Experiments verify that each AC control signal can and only can turn on its corresponding switching branch.

Instructions: 

file: ADS schematic.zip contains the schematic circuit of the inductive coupling part of the swiching array;

file: ADS simulation results.zip contains the simulation results of the inductive coupling part;

file: MEMS swich test.zip contains several test result of the actuation voltage of the fabricated MEMS switches;

file: switching array measurement.xlsx is the measurement results of L1-L4 branches of the switching array;

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[1] Lifeng Wang, Jinquan Wang, Yue Jin, "A Passive Wireless Switching Array Based on MEMS Switches", IEEE Dataport, 2019. [Online]. Available: http://dx.doi.org/10.21227/73yq-tp74. Accessed: Aug. 23, 2019.
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doi = {10.21227/73yq-tp74},
url = {http://dx.doi.org/10.21227/73yq-tp74},
author = {Lifeng Wang; Jinquan Wang; Yue Jin },
publisher = {IEEE Dataport},
title = {A Passive Wireless Switching Array Based on MEMS Switches},
year = {2019} }
TY - DATA
T1 - A Passive Wireless Switching Array Based on MEMS Switches
AU - Lifeng Wang; Jinquan Wang; Yue Jin
PY - 2019
PB - IEEE Dataport
UR - 10.21227/73yq-tp74
ER -
Lifeng Wang, Jinquan Wang, Yue Jin. (2019). A Passive Wireless Switching Array Based on MEMS Switches. IEEE Dataport. http://dx.doi.org/10.21227/73yq-tp74
Lifeng Wang, Jinquan Wang, Yue Jin, 2019. A Passive Wireless Switching Array Based on MEMS Switches. Available at: http://dx.doi.org/10.21227/73yq-tp74.
Lifeng Wang, Jinquan Wang, Yue Jin. (2019). "A Passive Wireless Switching Array Based on MEMS Switches." Web.
1. Lifeng Wang, Jinquan Wang, Yue Jin. A Passive Wireless Switching Array Based on MEMS Switches [Internet]. IEEE Dataport; 2019. Available from : http://dx.doi.org/10.21227/73yq-tp74
Lifeng Wang, Jinquan Wang, Yue Jin. "A Passive Wireless Switching Array Based on MEMS Switches." doi: 10.21227/73yq-tp74