[1] Sang Jeen Hong,
"Oxide Etching in CF4/O2 Plasma Using OES",
IEEE Dataport,
2024. [Online]. Available: http://dx.doi.org/10.21227/5v09-3z34. Accessed: Oct. 10, 2024.
@data{5v09-3z34-24,
doi = {10.21227/5v09-3z34},
url = {http://dx.doi.org/10.21227/5v09-3z34},
author = {Sang Jeen Hong },
publisher = {IEEE Dataport},
title = {Oxide Etching in CF4/O2 Plasma Using OES},
year = {2024} }
doi = {10.21227/5v09-3z34},
url = {http://dx.doi.org/10.21227/5v09-3z34},
author = {Sang Jeen Hong },
publisher = {IEEE Dataport},
title = {Oxide Etching in CF4/O2 Plasma Using OES},
year = {2024} }
TY - DATA
T1 - Oxide Etching in CF4/O2 Plasma Using OES
AU - Sang Jeen Hong
PY - 2024
PB - IEEE Dataport
UR - 10.21227/5v09-3z34
ER -
T1 - Oxide Etching in CF4/O2 Plasma Using OES
AU - Sang Jeen Hong
PY - 2024
PB - IEEE Dataport
UR - 10.21227/5v09-3z34
ER -
Sang Jeen Hong.
(2024).
Oxide Etching in CF4/O2 Plasma Using OES.
IEEE Dataport.
http://dx.doi.org/10.21227/5v09-3z34
Sang Jeen Hong,
2024.
Oxide Etching in CF4/O2 Plasma Using OES.
Available at:
http://dx.doi.org/10.21227/5v09-3z34.
Sang Jeen Hong.
(2024).
"Oxide Etching in CF4/O2 Plasma Using OES."
Web.
1. Sang Jeen Hong.
Oxide Etching in CF4/O2 Plasma Using OES [Internet].
IEEE Dataport; 2024.
Available from :
http://dx.doi.org/10.21227/5v09-3z34
Sang Jeen Hong.
"Oxide Etching in CF4/O2 Plasma Using OES."
doi:
10.21227/5v09-3z34