This study reports the properties and the sensing mechanism of Pd nanoparticles (PdNPs) decorated n+/n-/n+ double-junction silicon nanobelt (SNB) device as hydrogen (H2) gas sensor. The SNB devices are prepared via CMOS process. Plasma-enhanced atomic layer deposition (PEALD) is adopted for PdNPs deposition as sensing material on the Al2O3 dielectric of SNB devices. The PdNPs-decorated SNB devices working at room temperature are characterizedat H2 concentration ranging from 10 to 1000 ppm.

DOI Link: 
10.21227/1npe-tw43
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[1] Yu-Sheng Lin, Jeng-Tzong Sheu, "The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature", IEEE Dataport, 2022. [Online]. Available: http://dx.doi.org/10.21227/1npe-tw43. Accessed: Jan. 21, 2025.
@data{1npe-tw43-22,
doi = {10.21227/1npe-tw43},
url = {http://dx.doi.org/10.21227/1npe-tw43},
author = {Yu-Sheng Lin; Jeng-Tzong Sheu },
publisher = {IEEE Dataport},
title = {The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature},
year = {2022} }
TY - DATA
T1 - The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature
AU - Yu-Sheng Lin; Jeng-Tzong Sheu
PY - 2022
PB - IEEE Dataport
UR - 10.21227/1npe-tw43
ER -
Yu-Sheng Lin, Jeng-Tzong Sheu. (2022). The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature. IEEE Dataport. http://dx.doi.org/10.21227/1npe-tw43
Yu-Sheng Lin, Jeng-Tzong Sheu, 2022. The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature. Available at: http://dx.doi.org/10.21227/1npe-tw43.
Yu-Sheng Lin, Jeng-Tzong Sheu. (2022). "The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature." Web.
1. Yu-Sheng Lin, Jeng-Tzong Sheu. The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature [Internet]. IEEE Dataport; 2022. Available from : http://dx.doi.org/10.21227/1npe-tw43
Yu-Sheng Lin, Jeng-Tzong Sheu. "The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature." doi: 10.21227/1npe-tw43