This study reports the properties and the sensing mechanism of Pd nanoparticles (PdNPs) decorated n+/n-/n+ double-junction silicon nanobelt (SNB) device as hydrogen (H2) gas sensor. The SNB devices are prepared via CMOS process. Plasma-enhanced atomic layer deposition (PEALD) is adopted for PdNPs deposition as sensing material on the Al2O3 dielectric of SNB devices.PEALD of PdNPs provides high conformity and fine control of the particle size. The PdNPs-decorated SNB devices working at room temperature are characterizedat H2 concentration ranging from 10 to 1000 ppm.

DOI Link: 
10.21227/8z1j-5j72
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The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature
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[1] Yu-Sheng Lin, Jeng-Tzong Sheu, "The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature", IEEE Dataport, 2022. [Online]. Available: http://dx.doi.org/10.21227/8z1j-5j72. Accessed: Feb. 05, 2025.
@data{8z1j-5j72-22,
doi = {10.21227/8z1j-5j72},
url = {http://dx.doi.org/10.21227/8z1j-5j72},
author = {Yu-Sheng Lin; Jeng-Tzong Sheu },
publisher = {IEEE Dataport},
title = {The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature},
year = {2022} }
TY - DATA
T1 - The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature
AU - Yu-Sheng Lin; Jeng-Tzong Sheu
PY - 2022
PB - IEEE Dataport
UR - 10.21227/8z1j-5j72
ER -
Yu-Sheng Lin, Jeng-Tzong Sheu. (2022). The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature. IEEE Dataport. http://dx.doi.org/10.21227/8z1j-5j72
Yu-Sheng Lin, Jeng-Tzong Sheu, 2022. The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature. Available at: http://dx.doi.org/10.21227/8z1j-5j72.
Yu-Sheng Lin, Jeng-Tzong Sheu. (2022). "The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature." Web.
1. Yu-Sheng Lin, Jeng-Tzong Sheu. The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature [Internet]. IEEE Dataport; 2022. Available from : http://dx.doi.org/10.21227/8z1j-5j72
Yu-Sheng Lin, Jeng-Tzong Sheu. "The Properties and Sensing Mechanism of PdNPs-decorated Silicon Nanobelt Devices for H2 Sensing at Room Temperature." doi: 10.21227/8z1j-5j72