Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures

The following dataset summarizes key figures in reported photonic MEMS devices. The data was used to categorize devices, define and plot key figures of merit relevant to the field of photonic MEMS for scalable integrated circuits, as discussed in the invited review article  "MEMS for Photonic Integrated Circuits".

Dataset Files

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Documentation: 
[1] Carlos Errando-Herranz, Alain Yuji Takabayashi, Pierre Edinger, Hamed Sattari, Kristinn B. Gylfason, Niels Quack, "Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures ", IEEE Dataport, 2019. [Online]. Available: http://dx.doi.org/10.21227/fp2b-8b33. Accessed: May. 28, 2020.
@data{fp2b-8b33-19,
doi = {10.21227/fp2b-8b33},
url = {http://dx.doi.org/10.21227/fp2b-8b33},
author = {Carlos Errando-Herranz; Alain Yuji Takabayashi; Pierre Edinger; Hamed Sattari; Kristinn B. Gylfason; Niels Quack },
publisher = {IEEE Dataport},
title = {Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures },
year = {2019} }
TY - DATA
T1 - Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures
AU - Carlos Errando-Herranz; Alain Yuji Takabayashi; Pierre Edinger; Hamed Sattari; Kristinn B. Gylfason; Niels Quack
PY - 2019
PB - IEEE Dataport
UR - 10.21227/fp2b-8b33
ER -
Carlos Errando-Herranz, Alain Yuji Takabayashi, Pierre Edinger, Hamed Sattari, Kristinn B. Gylfason, Niels Quack. (2019). Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures . IEEE Dataport. http://dx.doi.org/10.21227/fp2b-8b33
Carlos Errando-Herranz, Alain Yuji Takabayashi, Pierre Edinger, Hamed Sattari, Kristinn B. Gylfason, Niels Quack, 2019. Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures . Available at: http://dx.doi.org/10.21227/fp2b-8b33.
Carlos Errando-Herranz, Alain Yuji Takabayashi, Pierre Edinger, Hamed Sattari, Kristinn B. Gylfason, Niels Quack. (2019). "Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures ." Web.
1. Carlos Errando-Herranz, Alain Yuji Takabayashi, Pierre Edinger, Hamed Sattari, Kristinn B. Gylfason, Niels Quack. Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures [Internet]. IEEE Dataport; 2019. Available from : http://dx.doi.org/10.21227/fp2b-8b33
Carlos Errando-Herranz, Alain Yuji Takabayashi, Pierre Edinger, Hamed Sattari, Kristinn B. Gylfason, Niels Quack. "Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures ." doi: 10.21227/fp2b-8b33