[1] SangJeen Hong, YunSeong Cho,
"Monitoring O₂ Plasma Parameters with a Single Langmuir Probe and OES in a 6-Inch ICP Etcher",
IEEE Dataport,
2024. [Online]. Available: http://dx.doi.org/10.21227/m0ma-pm28. Accessed: Feb. 18, 2025.
@data{m0ma-pm28-24,
doi = {10.21227/m0ma-pm28},
url = {http://dx.doi.org/10.21227/m0ma-pm28},
author = {SangJeen Hong; YunSeong Cho },
publisher = {IEEE Dataport},
title = {Monitoring O₂ Plasma Parameters with a Single Langmuir Probe and OES in a 6-Inch ICP Etcher},
year = {2024} }
doi = {10.21227/m0ma-pm28},
url = {http://dx.doi.org/10.21227/m0ma-pm28},
author = {SangJeen Hong; YunSeong Cho },
publisher = {IEEE Dataport},
title = {Monitoring O₂ Plasma Parameters with a Single Langmuir Probe and OES in a 6-Inch ICP Etcher},
year = {2024} }
TY - DATA
T1 - Monitoring O₂ Plasma Parameters with a Single Langmuir Probe and OES in a 6-Inch ICP Etcher
AU - SangJeen Hong; YunSeong Cho
PY - 2024
PB - IEEE Dataport
UR - 10.21227/m0ma-pm28
ER -
T1 - Monitoring O₂ Plasma Parameters with a Single Langmuir Probe and OES in a 6-Inch ICP Etcher
AU - SangJeen Hong; YunSeong Cho
PY - 2024
PB - IEEE Dataport
UR - 10.21227/m0ma-pm28
ER -
SangJeen Hong, YunSeong Cho.
(2024).
Monitoring O₂ Plasma Parameters with a Single Langmuir Probe and OES in a 6-Inch ICP Etcher.
IEEE Dataport.
http://dx.doi.org/10.21227/m0ma-pm28
SangJeen Hong, YunSeong Cho,
2024.
Monitoring O₂ Plasma Parameters with a Single Langmuir Probe and OES in a 6-Inch ICP Etcher.
Available at:
http://dx.doi.org/10.21227/m0ma-pm28.
SangJeen Hong, YunSeong Cho.
(2024).
"Monitoring O₂ Plasma Parameters with a Single Langmuir Probe and OES in a 6-Inch ICP Etcher."
Web.
1. SangJeen Hong, YunSeong Cho.
Monitoring O₂ Plasma Parameters with a Single Langmuir Probe and OES in a 6-Inch ICP Etcher [Internet].
IEEE Dataport; 2024.
Available from :
http://dx.doi.org/10.21227/m0ma-pm28
SangJeen Hong, YunSeong Cho.
"Monitoring O₂ Plasma Parameters with a Single Langmuir Probe and OES in a 6-Inch ICP Etcher."
doi:
10.21227/m0ma-pm28